In the fabrication of semiconductor devices, interconnects must be built or form
ID: 3160746 • Letter: I
Question
In the fabrication of semiconductor devices, interconnects must be built or formed. Identify two (2) suitable materials for interconnects in semiconductor device and explain two basic methods of making the interconnect. Lavatory wash basins (bathroom skin) have been successfully made from variety of engineering materials, including cast iron, steel, stainless steel, ceramics, and polymers (such as melamine). Consider the lavatory wash basin will be made from ceramic or polymer; discuss the possible means to fabricate the product from ceramic and polymer.Explanation / Answer
1. Copper and aluminium are two materials used for semi conductor interconnect. As both of them are good conductors.
1 Vias method : many interconnected materials are connected by etching holes and depositing tungsten in CVD method.
2. CMP : As to cater latest developments and include many interconnections and which will create less processing steps. This method is called Chemical mechanical planerization.