Please help me to answer these questions in detail. Thank you so much. 2. Module

Question

Please help me to answer these questions in detail. Thank you so much. 2. Module 2 -Sketch the structures of the RF plasma you observed for sputtering copper (not the fluorescent tube DC plasma.). Describe why the plasma has these structures. What plasma components are found in each region of your structure? Estimate the energy (in eV) and concentration (in percent) of each plasma component in each of the structures. What do you expect the spectra looks like in each structure? Explain your answers focusing on the differences between regions

Explanation / Answer

Solution:-

Structure of RadioFrequency Plasma:-

The plasma has this type of structure because under the constant voltage, the density of plasma always increase by driving frequency square.

The components found in each region are as follows:-

1) Sputtering Gas

2) Substrate and Film

3) Ar+ and Sputtering Target.

Energy of each plasma generally varies from 1 to 5 eV and concentarion varies from 6.5 to 26%. The spectra will look like a bright densed light i.e. similar to plasma structure.

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