I only need correct answer for part C and D, please double check make sure you g
ID: 3239353 • Letter: I
Question
I only need correct answer for part C and D, please double check make sure you get the correct answer, thanks!
Plasma etching is essential to the fine-line pattern transfer in current semiconductor processes. An article gives the accompanying data (read from a graph) on chlorine flow (x, in SCCM) through a nozzle used in the etching mechanism and etch rate (y, in 100 A/min).
The summary statistics are
(a) Does the simple linear regression model specify a useful relationship between chlorine flow and etch rate? (Use = 0.05.)
State the appropriate null and alternative hypotheses.
Calculate the test statistic and determine the P-value. (Round your test statistic to two decimal places and your P-value to three decimal places.)
State the conclusion in the problem context.
(b) Estimate the true average change in etch rate associated with a 1-SCCM increase in flow rate using a 95% confidence interval. (Round your answers to three decimal places.)
100 A/min
Interpret the interval.
(c) Calculate a 95% CI for
Y · 3.0,
the true average etch rate when flow = 3.0. (Round your answers to three decimal places.)
100 A/min
(d) Calculate a 95% PI for a single future observation on etch rate to be made when flow = 3.0. (Round your answers to three decimal places.)
100 A/min
x 1.5 1.5 2.0 2.5 2.5 3.0 3.5 3.5 4.0 y 24.0 24.5 25.5 31.0 33.5 39.5 40.5 47.0 50.0Explanation / Answer
The statistical software output for this problem is:
Simple linear regression results:
Dependent Variable: y
Independent Variable: x
y = 6.9871795 + 10.525641 x
Sample size: 9
R (correlation coefficient) = 0.97391438
R-sq = 0.94850921
Estimate of error standard deviation: 2.3631985
Parameter estimates:
Analysis of variance table for regression model:
Predicted values:
Hence,
c) 95% CI: (36.563, 40.565)
d) 95% PI: (32.629, 44.500)
Parameter Estimate Std. Err. Alternative DF T-Stat P-value Intercept 6.9871795 2.5942798 0 7 2.6933022 0.0309 Slope 10.525641 0.9269227 0 7 11.355468 <0.0001